Voice coil-based scanning probe microscopy

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Voice coil-based scanning probe microscopy

ABSTRACT We present a novel system for large-area scanning probe microscopy (SPM) measurements based on minimum counter-force linear guidance mechanisms, voice coils, interferometers and fuzzy logic-based feedback loop electronics. It is shown that voice coil-based actuation combined with interferometry can be a good alternative to piezoceramic positioning systems, providing fast and still suff...

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ژورنال

عنوان ژورنال: Nanoscale Research Letters

سال: 2012

ISSN: 1556-276X

DOI: 10.1186/1556-276x-7-332